Supplementary Information: Optimized ICP-MS Analysis of Elemental Impurities in Semiconductor-Grade Hydrochloric Acid

Supplementary Information: Optimized ICP-MS Analysis of Elemental Impurities in Semiconductor-Grade Hydrochloric Acid

August 31, 2017

These tables and figure are supplementary information to the article "Optimized ICP-MS Analysis of Elemental Impurities in Semiconductor-Grade Hydrochloric Acid."

These tables and figure are supplementary information to the article "Optimized ICP-MS Analysis of Elemental Impurities in Semiconductor-Grade Hydrochloric Acid," which was published in the September 2017 supplement issue Applications of ICP & ICP-MS Techniques for Today’s Spectroscopists to Spectroscopy (1).

 

Reference

  • K. Neubauer and E. Pruszkowski, Spectroscopy32(s9), 17–26 (2017).