Achieving Peak Performance from OES Broadband Spectra



Webinar Date/Time: Thu, Oct 19, 2023 11:00 AM EDT

Your plasma is excited, but are you? Learn how to implement and optimize broadband spectroscopy to get value out of your OES process you never knew was there.

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Event Overview:

This event will investigate how various broadband spectrometers and spectral components can come together to optimize Optical Emission Spectroscopy (OES) for the semiconductor industry. Coating and etching processes deal with a range of plasmas and operating conditions depending on the specific application, and there are better and worse options for those scenarios when choosing and implementing spectral monitors. By looking at resolution, sensitivity, spectral range, and various software settings, the audience will gain unique and valuable knowledge around end-point detection, plasma and impurity identification, and the extra benefits of NIR-detection many may not be aware of today.

Key Learning Objectives:

  • Learn how to prioritize resolution and sensitivity for various OES scenarios.
  • Understand how plasma power affects resulting spectral outputs.
  • Know the importance of software parameters for time-resolved end-point detection.

Who Should Attend:

  • Anyone working in the semiconductor market
  • Researchers in semiconductor and plasma fields


Derek Guenther
Senior Product Scientist
Ocean Optics

Derek A. Guenther has a B.S. in Chemical Engineering from the University of South Florida with a minor in Inorganic Chemistry. His work at the USF Institute for Environmental Studies focused on development of novel silica-based algaecides targeting invasive species in Florida fresh waterways. His strengths and passions lie in new chemical sensor developments and spectral numerical processing. Derek has spent over 15 years at Ocean Optics developing and supporting the oxygen, pH, and SERS-based optical sensor products, and also performing years of customer feasibility studies with the Lab Services Team. Today he works with the strategic marketing team to broadcast the excitement of spectroscopy out into the world.

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