Development of an In Situ Spectroscopic Method for Cleaning Validation Using Mid-IR Fiber Optics (PDF)

April 1, 2003
Spectroscopy

A fiber-optic, mid-IR spectroscopy probe combined with a grazing-angle reflectance sampling head can be used as a solvent-free, in situ method for validating cleanliness with substantial improvement in accuracy, compared with traditional methods.