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Development of an In Situ Spectroscopic Method for Cleaning Validation Using Mid-IR Fiber Optics (PDF)

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Spectroscopy

Spectroscopy, Spectroscopy-04-01-2003,

A fiber-optic, mid-IR spectroscopy probe combined with a grazing-angle reflectance sampling head can be used as a solvent-free, in situ method for validating cleanliness with substantial improvement in accuracy, compared with traditional methods.

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