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|Articles|January 1, 2005

Spectroscopy

  • Spectroscopy-01-01-2005
  • Volume 20
  • Issue 1

Considerations for Primary Vacuum Pumping in Mass Spectrometry Systems (PDF)

Author(s)D. Goodwin, A. Cameron, J. Ramsden

Mass spectrometry systems have specific vacuum requirements. New developments in oil-free, or dry, primary vacuum pumps have been introduced recently and are discussed in this article with respect to capacity, throughput, and specific pumping requirements for process gases.


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