Considerations for Primary Vacuum Pumping in Mass Spectrometry Systems (PDF)

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Spectroscopy

Spectroscopy, Spectroscopy-01-01-2005, Volume 20, Issue 1

Mass spectrometry systems have specific vacuum requirements. New developments in oil-free, or dry, primary vacuum pumps have been introduced recently and are discussed in this article with respect to capacity, throughput, and specific pumping requirements for process gases.