Article

Spectroscopy

Spectroscopy

Spectroscopy-01-01-2005
Volume20
Issue 1

Considerations for Primary Vacuum Pumping in Mass Spectrometry Systems (PDF)

Author(s):

Mass spectrometry systems have specific vacuum requirements. New developments in oil-free, or dry, primary vacuum pumps have been introduced recently and are discussed in this article with respect to capacity, throughput, and specific pumping requirements for process gases.

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Robert Ewing of the Pacific Northwest National Laboratory. | Photo Credit: Will Wetzel
Robert Ewing of the Pacific Northwest National Laboratory. | Photo Credit: Will Wetzel