Considerations for Primary Vacuum Pumping in Mass Spectrometry Systems (PDF)

Goodwin,D.;Cameron,A.;Ramsden,J.;Meares,P.;Chew,Andrew;Pumfrey,J.;Steele,D.;Hamilton,J.;Hawley-Jones,T.;

Considerations for Primary Vacuum Pumping in Mass Spectrometry Systems (PDF)

Published on: January 1, 2005

D. Goodwin, A. Cameron, J. Ramsden, P. Meares, A.D. Chew, J. Pumfrey, D. Steele, J. Hamilton, T. Hawley-Jones

Spectroscopy

Spectroscopy, Spectroscopy-01-01-2005, Volume 20, Issue 1

Mass spectrometry systems have specific vacuum requirements. New developments in oil-free, or dry, primary vacuum pumps have been introduced recently and are discussed in this article with respect to capacity, throughput, and specific pumping requirements for process gases.