Considerations for Primary Vacuum Pumping in Mass Spectrometry Systems (PDF)

January 1, 2005
D. Goodwin

,
A. Cameron

,
J. Ramsden

,
P. Meares

,
A.D. Chew

,
J. Pumfrey

,
D. Steele

,
J. Hamilton

,
T. Hawley-Jones

Spectroscopy

Spectroscopy, Spectroscopy-01-01-2005, Volume 20, Issue 1

Mass spectrometry systems have specific vacuum requirements. New developments in oil-free, or dry, primary vacuum pumps have been introduced recently and are discussed in this article with respect to capacity, throughput, and specific pumping requirements for process gases.