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© 2020 MJH Life Sciences and Spectroscopy Online. All rights reserved.
© 2020 MJH Life Sciences™ and Spectroscopy Online. All rights reserved.
January 01, 2005
Mass spectrometry systems have specific vacuum requirements. New developments in oil-free, or dry, primary vacuum pumps have been introduced recently and are discussed in this article with respect to capacity, throughput, and specific pumping requirements for process gases.