Through aberration-corrected scanning transmission electron microscopy (STEM) imaging and theoretical calculations, the researchers identified that neighboring sulfur vacancy pairs introduce additional shallow trap states through the hybridization of individual vacancy levels (1). These vacancy pairs are important because they have a great influence on the off currents and switching slopes of field-effect transistors based on 2D semiconductors (1).
As part of their study, the researchers focused on locating a shallow state that emerges through the hybridization of the neighboring sulfur vacancy pairs. They accomplished this by using DLTS and adapting it to single-layer MOCVD-grown molybdenum disulfide (MoS2) crystals using CMOS-compatible device geometry (1). DLTS also helped detect energy linewidths. Doing so helped them confirm the narrow bandwidth of the hybridized shallow state and considerable energy broadening of vacancy-sulfur traps (1).
The high sensitivity of DLTS measurements and its applicability to capacitor-based devices offer a pathway for understanding atomic defects and their electrical properties in 2D semiconductors. Based on the results of this study, the researchers anticipate that the future application of DLTS techniques in other 2D materials will be able to accomplish three objectives. First, they will enrich the defect library; second, they will unveil unexplored defect characteristics; and finally, DLTS technologies will facilitate effective defect engineering and mitigation (1).
As 2D materials continue their rapid progress towards electronic device applications, the DLTS technique stands poised as an efficient tool for defect characterization and device enhancement.
References
(1) Zhao, Y.; Tripathi, M.; Cernevics, K.; et al. Electrical Spectroscopy of Defect States and the Hybridization in Monolayer MoS2.Nat. Commun. 2023, 14, 44. DOI: 10.1038/s41467-022-35651-1
(2) Dahal, S. Using Raman Spectroscopy for Semiconductor Analysis. Available at: https://www.thermofisher.com/blog/materials/?p=13939 (accessed 2024-04-25).