MKS Instruments, Inc.


Spectroscopy, Spectroscopy-12-01-2017, Volume 32, Issue 12
Pages: 51

Company Description

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, lasers, optics and motion control.

Chief Spectroscopic Techniques Supported

  • Infrared (FT-IR and FT-NIR ) Spectroscopy

  • UV-Vis-NIR-MIR Spectroscopy

  • NDIR Spectroscopy

  • EI Mass Spectrometry

Markets Served

MKS Instruments partners with customers to solve the complex technology challenges affecting their ability to effectively monitor, deliver, analyze, power and control the critical parameters of the advanced processes they manage. Our primary served markets are manufacturers of capital equipment for semiconductors, industrial technologies, life and health sciences, and research and defense.

Major Products/Services

MKS Instruments offers an unparalleled range of sophisticated instruments, components, subsystems, and software designed to solve today's toughest technology challenges.

  • Automation & Control Solutions

  • Flow & Gas Delivery Solutions

  • Lasers & Light Sources: Spectra-Physics and Newport Products

  • Mass Spectrometry Solutions

  • Microwave Subsystems & Components

  • Motion Control: Newport Products

  • Optical Gas Analyzers

  • Optical Tables & Vibration Isolation Systems: Newport Products

  • Optics & Opto-Mechanics: Newport Products

  • Power: RF Generators, Impedance Matching Networks, RF Amplifiers

  • Pressure/Vacuum Measurement: Baratron® Direct & Indirect Pressure/Vacuum Gauges

  • Reactive Gas: Ozone Gas & Dissolved Ozone Liquid Delivery Generators & Systems

  • Remote Plasma Sources

  • Valve Solutions & Pressure Controllers


MKS Instruments operates in 60+ countries globally.

MKS Instruments, Inc.
2 Tech Drive, Suite 201,
Andover, MA 01810

(978) 645-5000

(978) 557-5100