Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

Kawabata,Katsu;Kishi,Yoko;Shi,Haiying;Thomas,Robert;

Article

Spectroscopy

September 1, 2004

Spectroscopy

Spectroscopy-09-01-2004

Volume

Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

Author(s):

Katsu Kawabata,Yoko Kishi

The authors show that dynamic reaction cell ICP MS can eliminate a number of argon- and carbon-based polyatomic interferences, allowing the determination of many critical elements in problematic organic compounds found in the semiconductor industry.

To view a PDF of this article from the Spectroscopy Online archives, click this link.

Articles in this issue

Focus on Quality: Validation of Spectrometry Software, Part IX (PDF)

End of the Spectrum: No Longer a Problem-less Solution (PDF)

Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

Process Monitoring: Moving from the Laboratory to the Line (PDF)

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Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

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