Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

September 1, 2004
Katsu Kawabata

,
Yoko Kishi

,
Haiying Shi

,
Robert Thomas

Robert Thomas has more than 30 years of experience in trace element analysis. He is the principal of his own freelance writing and scientific consulting company, Scientific Solutions, based in Gaithersburg, MD.

Spectroscopy

Spectroscopy, Spectroscopy-09-01-2004,

The authors show that dynamic reaction cell ICP MS can eliminate a number of argon- and carbon-based polyatomic interferences, allowing the determination of many critical elements in problematic organic compounds found in the semiconductor industry.

Related Content:

Mass Spectrometry