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Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

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Spectroscopy

Spectroscopy, Spectroscopy-09-01-2004,

The authors show that dynamic reaction cell ICP MS can eliminate a number of argon- and carbon-based polyatomic interferences, allowing the determination of many critical elements in problematic organic compounds found in the semiconductor industry.


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