Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

Kawabata,Katsu;Kishi,Yoko;Shi,Haiying;Thomas,Robert;

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Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

Published on: September 1, 2004

Katsu Kawabata, Yoko Kishi, Haiying Shi, Robert Thomas

Spectroscopy

Spectroscopy, Spectroscopy-09-01-2004,

The authors show that dynamic reaction cell ICP MS can eliminate a number of argon- and carbon-based polyatomic interferences, allowing the determination of many critical elements in problematic organic compounds found in the semiconductor industry.

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