Katsu Kawabata


Reduction of Carbon-Based Interferences in Organic Compound Analysis by Dynamic Reaction Cell ICP MS (PDF)

September 01, 2004

The authors show that dynamic reaction cell ICP MS can eliminate a number of argon- and carbon-based polyatomic interferences, allowing the determination of many critical elements in problematic organic compounds found in the semiconductor industry.

The Benefits of Dynamic Reaction Cell ICP-MS Technology to Determine Ultratrace Metal Contamination Levels in High-Purity Phosphoric and Sulfuric Acid.pdf

January 01, 2003

This study investigates the applicability of a quadrupole-based ICP-MS fitted with a dynamic reaction cell (DRC) to analyze high-purity phosphoric and sulfuric acid used in the semiconductor industry. It compares the DRC approach with traditional ICP-MS background reduction techniques to compensate for phosphorus- and sulfur-based interferences and presents data that suggests that the DRC technology can reach the next generation of semiconductor purity levels for these chemicals.