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Stephen Senturia

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Articles

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Tech Note: Diffractive MEMS in Spectroscopy

Yariv Geller;M.A. Butler;Stephen Senturia
April 1st 2005

MEMS are small, microfabricated devices that are finding application in a variety of industries in both analytical and manufacturing settings. This paper reviews the properties of diffractive MEMS devices and examines their application in chemical spectroscopy.

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