Automated Analysis of Trace Elemental Impurities in IPA

This study demonstrates how to measure ultratrace (parts-per-trillion) levels of inorganic impurities in isopropyl alcohol, a key process chemical for semiconductor fabrication. The method includes online calibration using the IAS Automated Standard Addition System for an Agilent ICP-QQQ instrument. The method allows the accurate and reliable quantification of ultratrace level impurities in IPA without requiring a highly skilled analyst.