News|Articles|November 2, 2023
Wet Chemistry - Quantitative Analysis of Common Components in a Chemical Mechanical Polishing CMP Slurry Using Raman Spectroscopy
Author(s)HORIBA
In this application note, Raman spectroscopy is explored as an easier and more flexible technique for quantifying common components in a CMP slurry, such as benzotriazole and glycine, without any sample preparation or costly consumables.
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