Yanyan Chen

Yanyan Chen is with Institute of Mechanics, Chinese Academy of Sciences, Beijing, China. He is also with Graduate School of the Chinese Academy of Sciences, Beijing, China.

Articles by Yanyan Chen

Refractive Index and Thickness Analysis of Natural Silicon Dioxide Film Growing on Silicon with Variable-Angle Spectroscopic Ellipsometry

ByYanyan Chen,Gang Jin

October 1st 2006

October 2006. The authors investigate the optical properties and thickness of natural SiO2 thin films grown on silicon substrates simultaneously with a VASE system by choosing different angles of incidence and wavelength ranges.

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$Refractive Index and Thickness Analysis of Natural Silicon Dioxide Film Growing on Silicon with Variable-Angle Spectroscopic Ellipsometry$
Refractive Index and Thickness Analysis of Natural Silicon Dioxide Film Growing on Silicon with Variable-Angle Spectroscopic Ellipsometry
Published: October 1st 2006 | Updated:

Yanyan Chen

Articles by Yanyan Chen

Refractive Index and Thickness Analysis of Natural Silicon Dioxide Film Growing on Silicon with Variable-Angle Spectroscopic Ellipsometry

Latest Updated Articles

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