Author | Gang Jin

Gang Jin is with Institute of Mechanics, Chinese Academy of Sciences, Beijing, China.


Refractive Index and Thickness Analysis of Natural Silicon Dioxide Film Growing on Silicon with Variable-Angle Spectroscopic Ellipsometry

October 01, 2006



October 2006. The authors investigate the optical properties and thickness of natural SiO2 thin films grown on silicon substrates simultaneously with a VASE system by choosing different angles of incidence and wavelength ranges.