Gang Jin is with Institute of Mechanics, Chinese Academy of Sciences, Beijing, China.
Refractive Index and Thickness Analysis of Natural Silicon Dioxide Film Growing on Silicon with Variable-Angle Spectroscopic Ellipsometry
October 2006. The authors investigate the optical properties and thickness of natural SiO2 thin films grown on silicon substrates simultaneously with a VASE system by choosing different angles of incidence and wavelength ranges.
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