Analyzing multielement nanoparticles in semicon chemicals

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Learn how the single particle ICP-QQQ (spICP-MS) technique can be used to characterize Ag, Fe3O4, Al2O3, Au, and SiO2 nanoparticles in semiconductor grade tetra methyl ammonium hydroxide (TMAH). Using the Agilent rapid multi-element nanoparticle analysis software, data can be collected sequentially for up to 16 elements in a single analysis, using optimum conditions for the measurement of each individual element. This function saves time and reduces the risk of contamination compared to conventional spICP-MS analysis, as data for multiple elements can be obtained with only one visit to the sample vial.