The Benefits of Dynamic Reaction Cell ICP-MS Technology to Determine Ultratrace Metal Contamination Levels in High-Purity Phosphoric and Sulfuric Acid.pdf

January 1, 2003
Katsu Kawabata

Yoko Kishi

Robert Thomas

Robert Thomas has more than 30 years of experience in trace element analysis. He is the principal of his own freelance writing and scientific consulting company, Scientific Solutions, based in Gaithersburg, MD.


Spectroscopy, Spectroscopy-01-01-2003,

This study investigates the applicability of a quadrupole-based ICP-MS fitted with a dynamic reaction cell (DRC) to analyze high-purity phosphoric and sulfuric acid used in the semiconductor industry. It compares the DRC approach with traditional ICP-MS background reduction techniques to compensate for phosphorus- and sulfur-based interferences and presents data that suggests that the DRC technology can reach the next generation of semiconductor purity levels for these chemicals.