Thickness Analysis of a Natural Oxide Film on a Microscopic Si Pattern


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The MSV-5000 series micro-spectrophotometer is designed to obtain transmission/reflection measurements over a wide wavelength range from the ultraviolet to the near-infrared wavelengths. It allows the measurement of an area as small as 10 µm diameter and the integrated high-resolution CCD video camera enables visual observation of the samples to determine the precise area to be measured. This instrument is suitable for measurement of micro samples or samples with microstructural features.