Oxford Instruments WITec

Articles by Oxford Instruments WITec

Confocal Raman microscopy enables detailed and non-destructive analysis of semiconductors. In the video we present the application of confocal Raman microscopy to analyze material characteristics including doping, stress fields, crystallinity and warpage of a 150 mm (6 inch) silicon carbide (SiC) wafer. To maintain this nanoscale-precision across the macroscopically large x and y dimensions of an entire wafer, we used the WITec alpha300 Semiconductor Edition Raman microscope.

Modular Raman imaging microscopes provide a toolset for configuring experiments that can integrate complementary methods and evolve along with individual requirements. Following an introduction to the theoretical background, Dr. Ievgeniia Iermak will describe several of its variations including 3D Raman imaging and optical profilometry-guided measurements. Examples will be provided to demonstrate Raman imaging’s chemical sensitivity, high resolution, ease of use, and versatility for pharmaceutical research.

Latest Updated Articles