News|Articles|February 6, 2025
Metallic Nanoparticle Analysis in Semiconductor-Grade H2SO4 by Multi-Quad SP-ICP-MS
Author(s)PerkinElmer
In semiconductor fabrication, controlling impurities is crucial. This work describes metallic nanoparticle analysis in sulfuric acid using the NexION® 5000 SP-ICP-MS.
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