Best Techniques for Testing Semiconductor Materials
The panelists discuss the different techniques used for testing semiconductor materials—such as ICP-MS, VPD, GDI, and GED-ICP-MS—including which approaches the industry will adopt more moving forward.
Controlling trace impurities is critical for yield and device reliability. This episode focuses on advanced analytical innovations, including the evolution of gas exchange devices and laser ablation techniques, helping fabs meet extreme purity standards.
Key discussion topics include:
• Strengths and challenges of VPD, GDI, and laser ablation methods.
• The importance of controlling gas-phase metallic impurities.
• How emerging techniques improve safety and contamination control.
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