News|Articles|September 25, 2025
Impurities in UPW by ICP-MS Using H2 and O2 Reaction Gases
Author(s)PerkinElmer
Key Takeaways
The NexION® 5000 ICP-MS utilizes hydrogen and oxygen reaction gases to achieve ultra-trace detection of impurities in ultrapure water, meeting SEMI F63-0521 standards.
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